AMHS for Semiconductor Fabrication Plant

A transfer and storage system for 300 mm semiconductor wafers. Achieves highly clean, low-vibration, and AI technology based high-performance transfer. Storage with N2 purge available. Zero downtime supporting operation for 24 hours, 365 days nonstop. 300mm半導体向け搬送・保管システム。搬送は高クリーン度、低振動、AIを使用して高能力を実現。窒素パージ保管が可能。24時間、365日稼働を支えるゼロダウンタイムを実現。